(a) 25-nm PEALD aluminium oxide and (b) 125-nm PECVD PP sublayers and (c) a AlO x /PP multilayer with 2.5 dyads. All samples were coated on silicon substrates with native oxide. Figure 4 Layer thickness and refractive index. Decreasing
layer thickness (filled circles) and refractive index at 633 nm (empty circles) of a PP sample in oxygen plasma as a function of time. Table 1 provides an overview of the moisture barrier performance of different hybrid multilayers. Moreover, the MLs were compared with a glass lid encapsulation, where the coated PEN was Epigenetics inhibitor substituted by a glass substrate, and single aluminium oxide layers. The latter was plasma enhanced and thermally grown, respectively. The TALD AlO x sample was fabricated with a Savannah 200 ALD tool (Cambridge Nanotech, Cambridge, MA, USA) at 80â„ƒ with a GPC of 0.12 nm/cycle. PEALD AlO x , grown at 400 W and 10-s pulse time, shows with 4.4 × 10 −3 gm −2 d −1, a significantly better barrier performance than SB525334 solubility dmso samples deposited at 100 W and 1-s pulse time and TALD AlO x films with the same layer thickness. A possible reason for this phenomenon will be discussed later. A
ML with 1.5 dyads has the same overall oxide thickness as a single aluminium oxide film. However, its WVTR of 3.6 × 10 −3 gm −2 d −1 is slightly lower. Although the difference is quite small, this might be a result of the splitting of one AlO x film into two layers in order to separate local defect paths. Continuing the stacking of dyads led to
a further improvement of the WVTR. With 3.5 dyads, a transmission rate of 1.2 × 10 −3 gm −2 d −1 could be realised. NVP-HSP990 mouse This value is only by a factor of 2 higher as the one of a glass lid encapsulation. The lag time, which is the time elapsing until the phase of steady-state arises, increased from approximately 55 h at 1.5 dyads to approximately 97 h at 3.5 dyads due to the extended pathways for water through the ML. At 3.5 dyads, the overall oxide thickness is twice as large as at 1.5 dyads. However, the WVTR is lower by a factor of 3. In contrast, doubling the layer thickness of TALD AlO x to 100 nm merely enhanced the permeation rate of about 20% (6.4 × 10 −3 gm −2 d −1), whereas reducing the thickness to 25 nm increases the WVTR by more than 1 order of magnitude (Table 2). This large rise may be attributed by the fact that not all particles and defects on the PEN surface are fully covered on the one hand and still remaining Idoxuridine water in the substrate, which influences the first nanometre of layer growth on the other hand. With continuing film growth, only defects with sizes >100 nm persist uncovered and dominate the permeation process, as the WVTR merely changes from 50 to 100 nm. Table 1 WVTRs with mean deviation of several AlO x /PP multilayers and single AlO x films, measured at 60â„ƒ and 90% RH Barrier WVTR [gm −2 d −1] Glass lid (6 ± 2) × 10 −4 3.5 dyads (1.2 ± 0.7) × 10 −3 2.5 dyads (2 ± 0.9) × 10 −3 1.5 dyads (3.6 ± 1.3) × 10 −3 50-nm PEALD aluminium oxide (400 W, 10 s) (4.