To study the effect of the additional solvent treatment of the silane-coated master mold on PDMS molding, right before (undiluted) PDMS casting, some master molds were dipped into toluene or hexane for 1 min and dried with nitrogen gun. Results Effect of solvent treatment on PDMS filling into nanoholes Figure 1 shows the scanning electron microscopy (SEM) image of the master mold consisting of array of holes

with various diameters. There are a total Talazoparib of ten different diameters in the mold; shown here are representative three with diameters of 500, 300, and 120 nm (smallest). Figure 1d is the cross-sectional view of the holes with diameter of 300 nm near a large etched area in order to reveal the etched profile, which shows a nearly vertical profile with depth close to 1,000 nm. However, the hole could be slightly shallower for smaller diameters due to the difficulty for etching species to diffuse into and for etching products to get out of the holes. Smaller holes are not necessary for the current study since, anyway, they could not be filled

by the PDMS. Figure 1 SEM image of the hole array pattern in master mold (hole depth approximately 1,000 nm). (a) Diameter 120 nm and array period 1,000 nm. (b) Diameter 300 nm and array period 1,000 nm. (c) Diameter 500 nm and array period 2,000 nm. (d) Cross-section near a large etched area, showing hole depth close to 1,000 nm. Samples were tilted 45° for SEM imaging. GDC-0449 research buy Figure 2 shows the filling of PDMS into the master mold treated with FOTS, but without any additional solvent treatment. Y-27632 2HCl For large diameters, the PDMS pillar array has a BI 2536 order cylindrical shape matching the hole profile in the master mold. The smallest diameter that PDMS can successfully fill is about 300 nm, though for this diameter the pillars were deformed due to PDMS’s low Young’s modulus and the stress generated during demolding. Smaller holes were not fully filled with the PDMS, having a very short hemi-spherical ‘bump’ shape rather than a long cylindrical shape. Figure 2 SEM images of PDMS pillars. The pillars were fabricated

by molding with undiluted PDMS into the FOTS-treated master mold without additional solvent treatment. The pillar diameters are (a) 760 nm, (b) 500 nm, (c) 300 nm. Smaller holes were not filled. Pillar deformation and significant charging during SEM imaging are evident in (c). Samples were tilted 45° for SEM imaging. Figure 3 shows the PDMS pillar arrays molded into the master template treated with FOTS, with additional surface treatment using toluene or hexane solvent. The smallest PDMS pillar diameters are 150 and 180 nm for surface treated with toluene and hexane, respectively, which are both smaller than the diameter of the PDMS pillars (300-nm diameter) molded into a master template without solvent treatment.